mlx90807/90808 integrated relative and absolute pressure sensors rev 003 page 1 of 7 data sheet 3901090808 feb/12 features and benefits compact monolithic (single die) solution absolute and relative pressure sensors for different ranges fully programmable through the connector with otp memory fully automotive compliant (overvoltage, reverse voltage, broken tracks and broken membrane diagnostics) fully automotive qualified beyond aec-q100 requirements rail-to-rail ratiometric analog output proportional to the applied pressure application examples automotive applications: ? engine management: map/tmap, barometers ? fuel management: fuel vapour, fuel delivery, cng/lpg ? braking systems: brake boosters ? oil pressure: engine, transmission ? filter control ? hvac systems home appliance applications: ? washing machines, dish washers, boilers ? home hvac systems medical applications ? respirators ? blood pressure monitoring ordering code product code temperature code package code op tion code packing form code mlx90807 l uf aaa-000 wb mlx90807 l uf caa-001 wb mlx90807 l uf cba-002 wb mlx90807 l uf cca-003 wb mlx90807 l uf cda-004 wb mlx90808 l uf caa-001 wb mlx90808 l uf cba-002 wb mlx90808 l uf cca-003 wb mlx90808 l uf cda-004 wb legend : product code: mlx90808=>absolute pre ssure sensor, mlx90807=>relative pressure sensor temperature code: l for temperature range -40c to 150c package code: uf for die on foil option code: mlx90807luf-aaa-000 = 0.06 ? 0.14 bar full span mlx90807luf-caa-001 = 0.4 ? 2 bar full span mlx90807luf-cba-002 = 2 ? 8 bar full span mlx90807luf-cca-003 = 8 ? 15 bar full span mlx90807luf-cda-004 = 15 ? 45 bar full span mlx90808luf-caa-001 = 0.6 ? 3 bar full span mlx90808luf-cba-002 = 3 ? 8 bar full span mlx90808luf-cca-003 = 8 ? 15 bar full span mlx90808luf-cda-004 = 15 ? 45 bar full span packing form: wb for waferbox ordering example: mlx90320lfr-bba-000-re
mlx90807/90808 integrated relative and absolute pressure sensors rev 003 page 2 of 7 data sheet 3901090808 feb/12 1 functional diagram general description the mlx90807 and mlx90808 are fully integrated relative and absolute pressure sensors respectively. they are realized with state of the art compatible cmos and mems technologies. piezoresistors in a wheatstone bridge configuration are implanted on the edges of a silicon membrane and transform the stress induced by the pressure on the membrane into an electrical signal. an analog chain interacting with a digital core performs the conditioning of the piezoresistors electrical signal. by writing calibration settings in the chip memory an uniform transfer function is obtained over pressure and temperature
rev 003 3901090808 2 absolute maximum r atings parameter supply voltage (overvoltage) supply voltage (operating) supply current, i dd with v dd = 16 v output voltage, v out supply current with output shorted to 0v .. 16v supply current limit, reverse polarity programming temperature range (zap cells operating temperature range storage temperature range burst pressure (versions aa-0 ca-1, cb-2, cc-3) front side exposed burst pressure (versions cd-4) front side exposed esd sensitivity (aec q100 002) table 1: absolute maximum ratings exceeding the absolute maximum ratings may cause pe rmanent damage. rated conditions for extended periods may affect de vice reliability. 3 die information die front side description. mlx90807/90808 integrated relative and absolute pressure sensor page 3 of 7 atings symb ol min value max value units v dd -14 16 v v dd 4.5 5.5 v i dd 25 ma v out -0.5 16 v supply current with output shorted to 0v .. 16v i dd 100 ma i dd 160 ma (zap cells ) t p -20 100 c t a -40 150 c t s - 50 150 c 5x the maximum full scale of that version 3x the maximum full scale of that version - 2 2 kv exceeding the absolute maximum ratings may cause pe rmanent damage. exposure to absolute rated conditions for extended periods may affect de vice reliability. mlx90807/90808 integrated relative and absolute pressure sensor s data sheet feb/12 exposure to absolute -maximum-
rev 003 3901090808 pad name vdd3 se1, se2, mow out vss table 2 : die back side description (only valid for the 90807, there is no opening at t he back side o 90808). the internal square represents the back side openin g of the 90807. t available for the die attach. dimensions in um a b c mlx90807-0 3830 3830 900 mlx90807-1 -2 -3 -4 3830 3830 1150 mlx90808-1 3830 3830 na mlx90808 -2 -3 -4 3830 3830 na mlx90807/90808 integrated relative and absolute pressure sensor page 4 of 7 name pad function / description supply pad se1, se2, mow test pads analog output pad ground pad, 2 pads are available but only one has to be connected : pad definitions and descriptions (only valid for the 90807, there is no opening at t he back side o the internal square represents the back side openin g of the 90807. t he dimensions c,d,e, f show d e f g h thickness 900 900 900 2000 2000 550 1150 1150 1150 1500 1500 550 na na na na na 570 na na na na na 580 mlx90807/90808 integrated relative and absolute pressure sensor s data sheet feb/12 (only valid for the 90807, there is no opening at t he back side o f the he dimensions c,d,e, f show the space
mlx90807/90808 integrated relative and absolute pressure sensors rev 003 page 5 of 7 data sheet 3901090808 feb/12 for more information on how the product is delivere d, how to perform the assembly of the product and h ow the product has been qualified to meet the most str ingent automotive quality requirements consult your local sales representative and ask for access to the foll owing documents: pressure sensors assembly guidelines pressure sensors shipping information qualifying mems based pressure sensors 4.general electrical specifications dc operating parameters t a = -40 o c to 150 o c, v dd = 5v (unless otherwise specified) parameter symbol min typ max units supply voltage v dd 4.5 5 5.5 v supply current i dd 4 7 10 ma output load resistance rload 4.47 100 kohm output capacitive load cload 2 47 100 nf low clamping level (versions ca-1, cb-2, cc- 3, cd-4) 5 7 % v dd high clamping level(versions ca-1, cb-2, cc-3, cd-4) 9 3 9 5 % v dd low clamping level (version aa - 0) 6.5 8.5 % v dd high clamping level (version aa - 0) 91 93.5 % v dd linearity error v out - 0.3 0.1 0.3 % fso ratiometricity error - 0.3 0.3 % fso output hysteresis vs temperature - 0.3 0.1 0.3 % fso noise (versions ca - 1, cb - 2, cc-3, cd-4) 2 mvrms power - up time 5 ms response time 10% / 90% t rp 10 C 90 1.5 ms table 3: electrical specifications parameter min typ max units output when sensor is broken 2 % v dd output when v dd is broken 4 % v dd output when v ss is broken 96 % v dd table 4: diagnostic features for more information on the electrical specificatio ns please contact your local sales representative a nd ask for the document pressure sensors error budget .
mlx90807/90808 integrated relative and absolute pressure sensors rev 003 page 6 of 7 data sheet 3901090808 feb/12 5. general description this chip integrates a pressure sensor and the asso ciated signal conditioning on the same die. the sup ply voltage v dd directly supplies the pressure sensor. the pressure sensing element consists of a square d iaphragm realized in the silicon chip by backside etching. due to its small thickness this diaphragm reacts to a pressure difference at both of its side by cambering. the internal strain increases, in partic ular at the border of the diaphragm. here, the piez o- resistive elements have been implanted into the sil icon diaphragm, which act as transducer. four resistors are placed in a wheatstone-bridge co nfiguration at the four borders of the square diaph ragm. a chopped instrumentation stage amplifies the diffe rential output signal of the sensor. the gain of th is amplifier can be adjusted with 3 bits. after the in put stage, there is a 3 bit programmable coarse off set which is followed by a differential to single-ended conve rsion. the reference voltage for this stage is gene rated by a 10 bit dac and varies linearly with temperature in order to perform the offset and offset drift compen sation. a digital hardware multiplier calculates this compens ation. the temperature signal, serving as input for this multiplier, is generated from the adc of the output signal of the internal temperature sensor. the chopped signal is demodulated with a switched c apacitor stage. the buffered output serves as refer ence for a 10 bit dac to perform the span and span drift compensation. the dac is controlled by the digital part. finally the signal is given out by a class ab rail- to-rail amplifier capable of sourcing and sinking l arge currents. a calibration of the transfer function using 3 temp erature points and 2-point pressure points per temp erature can be performed to achieve an error less than 1% over the complete pressure and temperature range (the output error is referred to the output span). ptc (programming through connector) protocol is use d to perform calibration. the programming of the sensor chip is carried out v ia the analog connections (i.e. supply, ground, sig nal out). no additional pins are necessary for calibration. m elexis delivers all required hardware and software to perform the calibration of the mlx90807 and mlx9080 8. for more information on how to perform the calibrat ion of the mlx90807/90808 consult the following documents: an ptc 90807 multi sensor calibration board an advanced calibration 90807 90808 software user manual mlx90807 ptc04 6. application information only 3 pins are used in the application (vdd, vss, out). calibration and programming is made through the app lication pins. only a capacitor on the supply and output lines are necessary.
mlx90807/90808 integrated relative and absolute pressure sensors rev 003 page 7 of 7 data sheet 3901090808 feb/12 7. disclaimer devices sold by melexis are covered by the warranty and patent indemnification provisions appearing in its term of sale. melexis makes no warranty, express, s tatutory, implied, or by description regarding the information set forth herein or regarding the freed om of the described devices from patent infringemen t. melexis reserves the right to change specifications and prices at any time and without notice. therefo re, prior to designing this product into a system, it is nece ssary to check with melexis for current information . this product is intended for use in normal commercial ap plications. applications requiring extended tempera ture range, unusual environmental requirements, or high reliability applications, such as military, medical life- support or life-sustaining equipment are specifical ly not recommended without additional processing by melexis for each application. the information furnished by melexis is believed to be correct and accurate. however, melexis shall no t be liable to recipient or any third party for any dama ges, including but not limited to personal injury, property damage, loss of profits, loss of use, interrupt of business or indirect, special incidental or consequ ential damages, of any kind, in connection with or arising out of the furnishing, performance or use of the t echnical data herein. no obligation or liability to recipien t or any third party shall arise or flow out of mel exis? rendering of technical or other services. ? 2012 melexis nv. all rights reserved. for the latest version of this document, go to our website at www.melexis.com or for additional information contact melexis direc t: europe, africa, asia: america: phone: +32 1367 0495 phone: +1 248 306 5400 e-mail: sales_europe@melexis.com e-mail: sales_usa @melexis.com iso/ts 16949 and iso14001 certified
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